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Over the past three decades, MEMS switches have emerged as a superior alternative to traditional electromechanical relays, offering exceptional performance that was once thought unattainable. Their ability to reliably switch signals from 0 Hz/dc up to hundreds of GHz with minimal signal loss has transformed the way electronic systems are designed and implemented. This advancement has opened new possibilities across various industries, enabling more compact, efficient, and high-performance solutions.
The advantages of MEMS technology extend beyond just performance—they also bring significant benefits in terms of size, reliability, and power efficiency. From electronic measurement systems to defense applications and medical devices, MEMS switches are helping to push the boundaries of what’s possible. While modern switching technologies each have their own strengths, no single solution is perfect. Relays, for example, suffer from limitations such as narrow bandwidth, limited actuation life, and large form factors. In contrast, MEMS technology offers world-class RF performance in a much smaller package, with an order of magnitude improvement in reliability.
Many companies have invested heavily in developing MEMS switching technology, but challenges remain. One of the earliest pioneers was Foxboro, which filed the first patent for an electromechanical MEMS switch in 1984. ADI entered the field in the early 1990s, conducting academic research on MEMS switching. By 1998, they had developed early prototypes, and by 2011, they made a major investment in building dedicated MEMS switch manufacturing facilities. Today, ADI is able to offer industry-leading MEMS switches that are not only production-ready but also highly reliable, high-performance, and compact—offering a viable replacement for outdated relay technology.
With over two decades of experience in MEMS development, ADI has built a strong foundation in this field. Their first successful MEMS product, the ADXL50 accelerometer, was introduced in 1991, followed by the ADXRS150, the first integrated MEMS gyroscope, in 2002. These early successes laid the groundwork for a robust MEMS product portfolio, with over one billion inertial sensors deployed across automotive, industrial, and consumer markets. This deep expertise has been instrumental in advancing MEMS switching technology.
At the core of ADI's MEMS switch design is the electrostatically actuated, cantilevered beam switch. Think of it as a microscopic mechanical relay, where metal-to-metal contacts are controlled through electrostatic forces. The switch operates by applying a DC voltage to the gate, generating an attractive force that pulls the beam down and closes the circuit. When the voltage is removed, the beam returns to its original position due to spring force, opening the connection again.
The manufacturing process involves several key steps, including the use of high-resistivity silicon, dielectric layers for insulation, and advanced CMOS processes for internal wiring. Metal vias and gold-based structures ensure reliable electrical connections, while the cantilever beam is suspended using a sacrificial layer to create an air gap. This design allows for low resistance and excellent RF performance.
To make the technology user-friendly, ADI has also developed a driver IC that generates the necessary high-voltage signals for actuation. This IC is co-packaged with the MEMS switch in a QFN package, ensuring ease of integration and low power consumption (typically between 10–20 mW). The driver IC operates on standard low-voltage CMOS logic, making it compatible with existing system designs.
Reliability is a cornerstone of ADI’s MEMS switch technology. The sealed silicon cap ensures long-term stability, while extensive testing—including cycle life, thermal stress, and mechanical vibration tests—ensures the switches meet the highest standards. Compared to traditional relays, MEMS switches can last up to 10 times longer, with cycle lives exceeding 1 billion operations. This makes them ideal for demanding applications like RF instrumentation and high-frequency communication systems.
In terms of performance, ADI’s MEMS switches deliver outstanding results. They achieve insertion losses as low as 1 dB at 26.5 GHz, with bandwidths exceeding 32 GHz in a QFN package. They also exhibit excellent linearity, with third-order intercept points above 69 dBm and the potential to go even higher. Additionally, they handle high power levels, supporting RF signals over 40 dBm without degradation.
Size is another major advantage. A four-throw MEMS switch occupies only 5% of the volume of a comparable electromechanical relay, significantly reducing board space requirements. This compact design is especially valuable in automotive test equipment, where high channel density is essential.
In conclusion, ADI’s MEMS switching technology represents a major leap forward in performance, reliability, and miniaturization. With capabilities spanning from DC to Ka-band, industry-leading cycle life, and ultra-low power consumption, these switches are redefining what’s possible in modern electronics. Whether in test equipment, defense systems, or medical devices, ADI’s MEMS switches are setting new benchmarks and driving innovation across multiple industries.